A flexibly programmable spin coater is available for homogeneous coating in a cleanroom atmosphere:
- Spin Coater: Cee 300 X (Brewer Science)
- Speed, acceleration, spin duration variable
- Substrate: rigid or flexible
- Substrate size: 9 to 450 mm
- Speed: max. 8000 rpm
- Layer thicknesses between 5 nm and 1 µm can be realised
